Gas Concentration Sensors

LVC to Piezocon Upgrade

 

ASM- Epsilon :  LVC to Piezocon Upgrade

Higher Productivity for Legacy ASM Tools - Improve Uptime and Reduce Maintenance Costs by Replacing Legacy LVCs with Piezocon

 

The Piezocon system lowers the tool’s cost-of-operation by extending the use of precursor cylinder, bubbler or sublimater sources. Fewer vessel changes mean higher ROI and more capacity without adding more processing tools.

Benefits

  1. Eliminates PCRC runs to stabilise the LVC
    • higher uptime, reduced gas consumption
  2. Reduced predeposition steps in recipe
    • higher uptime, reduced gas consumption
  3. Helps to use source material to completion
    • higher uptime, reduced gas consumption
  4. MTBF : 14 Years
    • higher uptime, less maintenance cost

POSAS can deliver an LVC Upgrade Kit:

  • 1 Piezocon Sensor
  • 1 Sensor controller
  • Cable Set
  • Tubing set

Tubing with VCR connections: 

  • All tubing and brackets to replace the LVC inexisting ASM Epsilon gas cabinet

Cable Set:

  • Cable to connect the Piezocon controller with LVC ASM tool controller
  • Cables to connect PZ-Sensor and PZ-Controller
  • Cables to connect MFC and PZ-Controller

Let's Move forward Together!

Enjoy the benefits of better process stability, less maintenance, lower gas consumption and higher tool uptime after an easy and seamless integration into your existing tools!