HALO KA Max H2O
Detections: H2O
Gas Type: UHP
Our highest performing moisture analyzer. The ultimate trace gas analyzer for the highest purity bulk gases used in advanced semiconductor manufacturing.
Available Background Gases
N2 • He • Ar • H2 • O2 • CDA
Features and Benefits
- Part-per-trillion detection limits
- Calibration-free with zero drift
- Outstanding speed of response
- No consumables or maintenance
Applications
- UHP Gas quality control
- Semiconductor bulk gas
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
HALO KA Max NH3
Detections: NH3
Gas Type: UHP
Our highest performing ammonia analyzer. The ultimate trace gas analyzer for the highest purity bulk gases used in advanced semiconductor manufacturing.
Available Background Gases
N2
Features and Benefits
- Part-per-trillion detection limits
- Calibration-free with zero drift
- Outstanding speed of response
- No consumables or maintenance
Applications
- UHP Gas quality control
- Semiconductor bulk gas
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
HALO KA Max CH4
Detections: CH4
Gas Type: UHP
Our highest performing methane analyzer. The ultimate trace gas analyzer for the highest purity bulk gases used in advanced semiconductor manufacturing.
Available Background Gases
N2 • He • Ar • H2 • O2
Features and Benefits
- Part-per-trillion detection limits
- Calibration-free with zero drift
- Outstanding speed of response
- No consumables or maintenance
Applications
- UHP Gas quality control
- Semiconductor bulk gas
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
