Trace Gas analysis

T-I Max

 
 

T-I Max NH3

Detections: NH3t i max nh3

Gas Type: UHP • AIR

The latest generation AMC monitor for the most advanced semiconductor fabs. This analyzer monitors ppt-levels of ammonia (NH3) in real-time in the cleanroom and other micro environments.

Available Background Gases

Cleanroom Air • N2 • CDA

Features and Benefits

  • Part-per-trillion detection limits
  • Calibration-free with zero drift
  • Outstanding speed of response
  • No maintenance

Applications 

  • Airborne Molecular Contaminants in cleanrooms
  • FOUP and Pod monitoring
  • Reticle storage
  • Mobile AMC cart (w/ GO-cart)

Communication Interfaces

Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)

Options & Accessories

  • Serani Max interface software
  • GO-cart mobile solution
  • External particle filter
  • Requires vacuum pump

t i max nh3 tabelle

 

T-I Max HF

Detections: HFt i max hf

Gas Type: UHP • AIR

The latest generation AMC monitor for the most advanced semiconductor fabs. This analyzer monitors ppt-levels of hydrogen fluoride (HF) a in real-time in the cleanroom and other micro environments.

Available Background Gases

Cleanroom Air • N2 • CDA

Features and Benefits

  • Part-per-trillion detection limits
  • Calibration-free with zero drift
  • Outstanding speed of response
  • No maintenance

Applications

  • Airborne Molecular Contaminants in cleanrooms
  • FOUP and Pod monitoring
  • Reticle storage
  • Mobile AMC cart (w/ GO-cart)

Communication Interfaces

Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)

Options & Accessories

  • Serani Max interface software
  • GO-cart mobile solution
  • External particle filter
  • Requires vacuum pump

t i max hf tabelle

 

T-I Max HCI

Detections: HCIt i max hci

Gas Type: UHP • AIR

The latest generation AMC monitor for the most advanced semiconductor fabs. This analyzer monitors ppt-levels of hydrogen chloride (HCl) in real-time in the cleanroom and other micro environments.

Available Background Gases

Cleanroom Air • N2 • CDA

Features and Benefits

  • Part-per-trillion detection limits
  • Calibration-free with zero drift
  • Outstanding speed of response
  • No maintenance

Applications

  • Airborne Molecular Contaminants in cleanrooms
  • FOUP and Pod monitoring
  • Reticle storage
  • Mobile AMC cart (w/ GO-cart)

Communication Interfaces

Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)

Options & Accessories

  • Serani Max interface software
  • GO-cart mobile solution
  • External particle filter
  • Requires vacuum pump

t i max hci tabelle