Detections: H2O

Gas Type: UHP • IND • CR • SP

The state-of-art trace moisture analyzer for high purity bulk and specialty gases used in semiconductor manufacturing and other high-purity applications.

Available Background Gases

N2 • He • Ar • H2 • O2 • CDA • CO • CO2 • GeH4 (mix) • COS • Ne • Kr • Xe • Cl2 • HCl • HBr • SF6 • NF3 • CxFy

Features and Benefits

  • Part-per-trillion detection limits
  • Calibration-free with zero drift
  • Fast speed of response
  • Large selection of gas matrices
  • No consumables or maintenance

Applications

  • UHP Gas quality control
  • Semiconductor bulk gas
  • Industrial gas QC
  • High-Purity CO2
  • Etch and cleaning gases
  • Fluorinated gases

Communication Interfaces

Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)

Options & Accessories

  • Serani Max interface software
  • Speed+ performance upgrade
  • Corrosion-resistant model
  • Environmental enclosure

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