Detections: H2O
Gas Type: UHP • SP
The HALO LP is designed for the detection of trace moisture in hydrides, such as ammonia, phosphine and arsine, which are used in the production of LEDs and semiconductor devices.
Available Background Gases
N2 • He • Ar • H2 • NH3 • PH3 • AsH3 • NO
Features and Benefits
- Part-per-billion detection limits
- Calibration-free with zero drift
- Fast speed of response
- No consumables or maintenance
- Low-pressure operation for interference-free detection
Applications
- High-brightness LED production
- Semiconductor specialty gas
- UHP ammonia QC
- MOCVD
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
- Speed+ performance upgrade
- Environmental enclosure
- Requires vacuum pump
Select Specifications
