Detections: O2
Gas Type: UHP • IND • SP
The world’s only all-optical ultratrace oxygen analyzer. Ideal addition to HALO KA and HALO KA Max analyzers for purity monitoring of bulk gases used in semiconductor manufacturing.
Available Background Gases
N2 • He • Ar • H2 • CO2
Features and Benefits
- Part-per-trillion detection limits
- Calibration-free with zero drift
- Outstanding speed of response
- No false spiking or false positives
Applications
- UHP Gas quality control
- Semiconductor bulk gas
- Oxygen analysis in CO2
- Fuel-cell hydrogen analysis
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
- Requires H2 utility gas
