The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen.
The CAT-O3 series of ozone destructs are made from a welded stainless steel enclosure protected with a heat shield. They are carefully designed to meet the industry’s stringent safety performance requirements.
Features
- All welded construction
- Self contained
- Rapid reaction time
- No consumables
- No maintenance
- Simple installation
Specifications
| Application | Catalytic Ozone Destruct |
| Principle of Operation | Catalytic |
| Catalyst | Manganese dioxide based compound |
| Outlet Concentration | <0.01 ppm (well below OSHA requirements) |
| Material | Aluminum with SS fittings |
| Capacity (up to) | CAT-03-E: 20 SLPM at 340 g/Nm3 CAT-03-F: 32 SLPM at 340 g/Nm3 CAT-03-G: 88 SLPM at 200 g/Nm3 |
| Inlet/Outlets | CAT-03-E: 1/2" stainless steel stubs or 1/2" male VCR CAT-03-F: 1/2" stainless steel stubs or 1/2" male VCR CAT-03-G: 3/4" male VCR |
| Outside Cylinder Dimensions (LxDxH) | CAT-03-E: 17.00" x 4.00" x 5.13" (431.80 mm x 101.60 mm x 130.30 mm) CAT-03-F: 25.50" x 4.00" x 5.13" (640.08 mm x 101.60 mm x 130.30 mm) CAT-03-G: 23.28" x 7.00" x 7.38" (591.30 mm x 177.80 mm x 187.50 mm) |
| External Temperature | Below 30°C or 86°F |
| Maintenance | None |
| Lifetime | 3 to 5 years or longer |
| Heater Option | Available for wet, off gas applications |
| Warranty | 1 year |
Applications
- Semiconductor
- CVD TEOS/Ozone
- ALD
- MOCVD
- Ashers
- Wet Benches
- Spray Tools
- Other