The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
The Model 470 Sensor incorporates an innovative dual optical-path sample sensing technology to provide unparalleled performance and virtually eliminate the need for a reference liquid measurement.
A typical installation consists of the 470 sensor and an interconnecting Teflon 7 jacketed cable. The 470 sensor includes the ability to remotely report the concentration that is being measured via analog or digital signals to the wet bench console.
Features
- In-situ monitoring
- In-line, full-flow capability
- Straight-through flow path
- No moving parts
- No consumables
- Ranges up to 150 mg/L
- Remote zero calibration
- High accuracy UV Absorption method
- Dual optical-path sample sensing technique
- No regular maintenance required
- Semiconductor-grade wetted materialsCompact Tefl on enclosure
- Teflon7-jacketed interconnection cable
Applications
- Dissolved ozone in liquid phase
- Semiconductor Wet Bench systems
- Ultrapure water systems
- Pharmaceutical industry
- Water treatment applications
- Other industrial processes
Specifications
| Measuring Principle | UV Absorption, dual optical-path sample sensing technique (patented) |
| UV Light Source | Low pressure mercury vapor lamp |
| Units of Measure | ppmw, mg/L |
| Range | Up to 150 mg/L (150 ppmw) |
| Precision | 0.5 mg/L or 1% of reading (whichever is greater) |
| Water Flow | Up to 150 SLPM |
| Sample Ports | 1”, 3/4”, 1/2” Flaretek® fittings |
| MAX Pressure | 55 PSI |
| Wetted Materials | Teflon®, sapphire, compatible with semiconductor processes |
| Enclosure | PTFE Teflon® |
| Dimensions | 5.69” W x 6.8” H x 3.2” D - mounted vertically (144 x 171 x 82 mm) |
| Maintenance | UV lamp replacement every 24 months No other scheduled maintenance |
| Cable | Teflon®-jacketed |
| Power | +15 VDC |
| Compliance | CE pending |
| Analog Output | 4 to 20 mA or 0 to 5 VDC, Factory Configured |
| Digital I/O | RS232 or RS485, Factory Configured |
| Remote Zero | Remote zero calibration via DB15 |
Specifications subject to change without notice.