470

The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.​

The Model 470 Sensor incorporates an innovative dual optical-path sample sensing technology to provide unparalleled performance and virtually eliminate the need for a reference liquid measurement.​

A typical installation consists of the 470 sensor and an interconnecting Teflon 7 jacketed cable. The 470 sensor includes the ability to remotely report the concentration that is being measured via analog or digital signals to the wet bench console.

Features

  • In-situ monitoring
  • In-line, full-flow capability
  • Straight-through flow path
  • No moving parts
  • No consumables
  • Ranges up to 150 mg/L
  • Remote zero calibration
  • High accuracy UV Absorption method
  • Dual optical-path sample sensing technique
  • No regular maintenance required
  • Semiconductor-grade wetted materialsCompact Tefl on enclosure
  • Teflon7-jacketed interconnection cable

Applications

  • Dissolved ozone in liquid phase
  • Semiconductor Wet Bench systems
  • Ultrapure water systems
  • Pharmaceutical industry
  • Water treatment applications
  • Other industrial processes

Specifications

Measuring Principle UV Absorption, dual optical-path sample sensing technique (patented)
UV Light Source Low pressure mercury vapor lamp
Units of Measure ppmw, mg/L
Range Up to 150 mg/L (150 ppmw)
Precision 0.5 mg/L or 1% of reading (whichever is greater)
Water Flow Up to 150 SLPM
Sample Ports 1”, 3/4”, 1/2” Flaretek® fittings
MAX Pressure 55 PSI
Wetted Materials Teflon®, sapphire, compatible with semiconductor processes
Enclosure PTFE Teflon®
Dimensions
5.69” W x 6.8” H x 3.2” D - mounted
vertically (144 x 171 x 82 mm)
Maintenance
UV lamp replacement every 24 months
No other scheduled maintenance
Cable Teflon®-jacketed
Power +15 VDC
Compliance CE pending
Analog Output 4 to 20 mA or 0 to 5 VDC, Factory Configured
Digital I/O RS232 or RS485, Factory Configured
Remote Zero Remote zero calibration via DB15

 

Specifications subject to change without notice.
All specifications are based on constant conditions.