Advanced In-situ Emissivity Independent Non-contact Temperature Monitor
The NTM Delta is the only high accuracy and repeatability pyrometer which incorporates both real-time same-point emissivity and temperature measurement.
Its design is based on CI Semi’s well-known NTM500, with thousands of installations worldwide.
The Delta’s rapid update rate and small footprint make it ideal for demanding applications such as RTP.
The high sensitivity and broad dynamic range allow low minimum temperatures to be accurately measured. Application- dependent algorithms allow for subtraction of interfering background radiation. The NTM Delta measures wafer temperatures in RTP, PVD, HDP-CVD, and other processes.