Multi Channel Concentration Analyzer
CI-SEMI’s in-line, multi-channel wet process analysis system, WetSpec 200 enables non-contact real-time monitoring and closed-loop control of chemical composition in wet process applications.
The WetSpec200 is ideal for monitoring, cleaning and etching chemistries. Based on CI-SEMI’s novel chemo-metric methodology, the WetSpec200 measures the absorption spectrum in the near infrared (NIR) fast and accurately without labor and waste involved.
The system’s versatile SW models enable soft-switch between different chemistries. With the capability to monitor up to eight flow cells in parallel, the WetSpec200 provides an efficient, low cost per channel process monitoring.
When integrated into a control system, the WetSpec200 enables tighter process control and identifies process excursions before they affect yield.
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Features and Benefits
- In-line, real-time monitoring and characterization of chemical composition of liquids
- No need for chemical sampling or dilution
- Short measurement time and low operational costs
- One analyzer can monitor several measuring cells with different chemistries
- Analysis of complex (multi-component) chemistries
- Real-time measurement enables closed loop control
- Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient location
Typical Applications
| Application | Component | Range, wt% |
| SC1 | NH4OH | 0 – 6 |
| H2O2 | 0 – 10 | |
| SC2 | HCl | 0-4 wt% |
| DSP (Dilute Sulfuric Peroxide) | H2SO4 | 8 – 13 |
| H2O2 | 2 – 5 | |
| HF/HCl | HF | 0-20 |
| HCI | 0 – 1.2 | |
| HF | HF | 0 – 20 |
| Phosphoric | H3PO4 | 80-90 |
| SPM | H2SO4 | 70-90 |
| H2O2 | 0-10 | |
| Hydrofluoric Peroxide | HF | 22 – 27 |
| H2O2 | 13 – 17 | |
| Buffered Oxide Etch | HF | 1 – 5 |
| NH4F | 16 – 24 | |
| Nitric/Acetic Acid | HNO3 | 1 – 4 |
| CH3COOH | 8 – 12 | |
| ACT 970 | Water | 14 – 19 |
| EKC265 | Water | 16 – 28 |
| ST-26S | Water | 5 – 20 |
| ST-250 | Water | 34 – 38 |
| Peroxide in CMP Slurry | H2O2 | 0 – 5 |
| Ammonium Hydroxide | NH4OH | 0 – 5 |
| Citric Acid | Citric Acid | 0 – 1.5 |
Other chemistries supported per request