opti sense ndir teledyne

The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.
All OPTI-Sense sensors are configured with analog and digital interfaces, making them easy to integrate into any process. Configurations are available for the measurement of single and dual gas species.


  • Non-Dispersive Infrared (NDIR)
  • Ideal for any infrared-absorbing gases
  • Fast response time
  • High sensitivity
  • Species specific
  • No consumables
  • No moving parts


pdf blue  Data Sheet

Supported Gases

Consult factory for your application.

  • SiF4
  • CF4
  • SiF3
  • SF6
  • CO
  • NF3
  • CO 2
  • WF6
  • And various other species


  Measuring Principle Non Dispersive IR absorption
Application In Situ Measurement
Light Source MEMS-based Pulsed IR Emitter
​​Materials Corrosion Resistant Optics, Stainless Steel Wetted Parts​
Dimensions (WxHxD)  4.72” x 8.66” x 3.15” (120 mm x 220 mm x 80 mm)
Weight < 7 lbs (3.17 kg)​
Analog Output Factory set to 0-1, 5 or 10 volt
​​ Digital Interface RS-232 C
Response Time < 10 seconds
Power Requirements 15 VDC - Less than 10 watts
Sample Ports KF16 - 304 SS (for other options, consult factory)
Zeroing Remote Zeroing Capability
Leak Testing Vacuum Leak-Tight Cell
  Software Embedded (standard)
Approvals​ CE
​​​Warranty ​​1 year
 optisense dimensions