Gas mixing Systems

 The Veeco DMS is a gas mixing system for gases used in wafer doping processes.

  Data Sheet

• Improves Dopant Concentration Reproducibility from ±/- 3 to 5% relative (chemical supplier’s specs) to ± 0.25%
  which greatly improves dopant process reproducibility

• Potentially reduces number of bottle changes by 100X.
  This significantly reduces dopant supply related expenses

• Greatly increases Tool Productivity

  Virtually eliminates tool requals after bottle changes.
  Tool availability increases by as much as 18%

• Very High ROI.
  Typically, after 2 to 6 months, the money saved by using this tool will exeecd its price.

Data sheet