The Veeco DMS is a gas mixing system for gases used in wafer doping processes.
- Improves Dopant Concentration Reproducibility from ±/- 3 to 5% relative (chemical supplier’s specs) to ± 0.25%
which greatly improves dopant process reproducibility
- Potentially reduces number of bottle changes by 100X.
This significantly reduces dopant supply related expenses
- Greatly increases Tool Productivity
Virtually eliminates tool requals after bottle changes.
Tool availability increases by as much as 18%
- Very High ROI.
Typically, after 2 to 6 months, the money saved by using this tool will exeecd its price.