The Veeco DMS is a gas mixing system for gases used in wafer doping processes.

pdf blue  Data Sheet

  • Improves Dopant Concentration Reproducibility from ±/- 3 to 5% relative (chemical supplier’s specs) to ± 0.25%
    which greatly improves dopant process reproducibility
  • Potentially reduces number of bottle changes by 100X.
    This significantly reduces dopant supply related expenses
  • Greatly increases Tool Productivity

    Virtually eliminates tool requals after bottle changes.
    Tool availability increases by as much as 18%

  • Very High ROI.
    Typically, after 2 to 6 months, the money saved by using this tool will exeecd its price.

posas dms 1


Data sheet