The Complete Solution for Precision Point-of-Use Gas Mixing
Data sheet - Coming soon
The Apex Gas Mixing System, powered by Veeco’s production-proven Piezocon® Gas Concentration Sensor, allows manufacturers to reduce production costs by purchasing lower-cost, higher-concentration gases, then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. By using Piezocon to measure and control the mixture in real time, manufacturers eliminate the problems associated with constant flow mixers requiring wasted materials and constant scrubbing, furthering the already substantial cost savings. The stable output and precise control of gas concentration allows Apex to drive higher process tool up-time, eliminating the need to re-qualify after every gas cylinder change, reducing—and in some cases fully eliminating—system down-time due to routine cylinder changes. Apex drives real-time control, high precision and reproducibility and lowers cost of ownership for semiconductor manufacturers.
- Optimized for applications requiring low-concentration, high-precision and cost-sensitive gas mixtures
- Improves repeatability by 10x or more when compared to individual gas cylinders
- Increases system up-time by eliminating excursions and re-qualifications, and reducing test time
- Immediately reduces gas purchase costs by as much as 60 percent
- Seamlessly integrates with existing installed base for a wide range of applications including solar, semiconductor and more
- The only gas mixing system that uses Veeco’s Piezocon Gas Concentration Sensor for ppm-level control
Apex Specifications - Example for 1% GeH4
| Input gas #1 | 10–100% GeH4/H2 |
| Input gas #2 | UHP Hydrogen 5.0 Grade |
| Overall dimensions (width x depth x height) | 34” x 28.2” x 93.8” |
| Accumulator tank | Electropolished — 100 L |
| Enclosure | Painted enclosure for indoor application |
| Output gas concentration range | 1–10% (typical) |
| Output gas concentration repeatability | ± 0.003% (absolute range) |
| Output flow rate (average) | 0 - 8 SLPM |
| Output pressure | 55–65 psig |
| Inlet to supply pressure drop | 40-45 psig |
| Operating voltage | 100/240 VAC, 6 AMPS, 50/60Hz, 1 Phase |
| 2nd Sensor to validate output gas | Standard |
| Capability to Match to current process cylinder | Automated routine for matching to reference cylinder |
| PLC and HMI | Touchscreen interface with P&ID layout |
| Automated Maintenance routines | Automated pump/purge routines |
| Wafer Fab Communications Connectivity | Modbus TCP |
| Toxic Gas Monitor | Standard (GeH4 0.2 ppm TLV) |
| Certifications | CE, SEMI-S2, S6, S8 |
| Options | |
| Trace contaminants analysis | <10 ppbO2, H2O |
| Light Tower | 3 light configuration (R, Y, G) |
Apex GMS Cost of Ownership and ROI Example for 1% GeH4
| 1% GeH4 | 10% GeH4 | 20% GeH4 | |
| Without Apex | With Apex | With Apex | |
| Approx Cost per Cylinder | $4,000 | $14,000 | $19,500 |
| 1% Equivalent Cylinders | 1 | 5,5 | 12 |
| # Cylinders required per Month | 20 | 3,6 | 1,7 |
| Material Cost per Month | $80,000 | $50,400 | $33,150 |
| Material Savings per Month | - | $29,600 | $46,850 |
| % Material Savings per Month | - | 37% | 59% |
| Approx Apex GMS Payback (Months) | - | 11 – 12 | 7–8 |
| Approx ROI for First-Year Period | - | 95–105% | 155–165% |
For real-time control, high precision and repeatability, and lower cost of ownership, count on the Apex Gas Mixing System from Veeco.