The Extrel VeraSpecâ„¢ APIMS from Extrel have the speed, sensitivity, and ease-of-use to continuously monitor Nitrogen, Argon, Helium, Oxygen, and Hydrogen supply streams and rapidly report ppt-level contamination to protect the electronics fabrication process.

 

Products

Extrel VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

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veraspec apims

Extrel MAX300-LG

High Performence Quantitative Gas Analyzer

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max300 lg